Registration Dossier

Data platform availability banner - registered substances factsheets

Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.

The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.

Diss Factsheets

Manufacture, use & exposure

Uses at industrial sites

Documentsopen allclose all

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
Name of activity / technique:
C2F6 is used for the etching of semiconductor material or the cleaning of chemicals vapour deposition chambers within semiconductor sector.
Environmental release category (ERC):
ERC5: Use at industrial site leading to inclusion into/onto article
Contributing activity / technique for workers
Name of activity / technique:
C2F6 is used for the etching of semiconductor material or the cleaning of chemicals vapour deposition chambers within semiconductor sector.
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Substance supplied to that use in form of:
as such
Subsequent service life relevant for this use:
yes

Uses at industrial sites

Contributing activity / technique for the environment
Environmental release category (ERC):
ERC6a: Use of intermediate
Contributing activity / technique for workers
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
Product category used:
PC 15: Non-metal-surface treatment products
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Subsequent service life relevant for this use:
no

Uses at industrial sites

Contributing activity / technique for the environment
Name of activity / technique:
Recovery operation /recycling/reclamation/destruction
Environmental release category (ERC):
ERC7: Use of functional fluid at industrial site
Contributing activity / technique for workers
Name of activity / technique:
Recovery operation /recycling/reclamation/destruction
Process category (PROC):
PROC 3: Manufacture or formulation in the chemical industry in closed batch processes with occasional controlled exposure or processes with equivalent containment conditions
PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
Product category used:
PC 16: Heat transfer fluids
Sector of end use:
SU 17: General manufacturing, e.g. machinery, equipment, vehicles, other transport equipment
Substance supplied to that use in form of:
as such
in a mixture
Subsequent service life relevant for this use:
yes
Related assessment:
use not assessed

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
Name of activity / technique:
Electronic component manufacture
Environmental release category (ERC):
ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workers
Name of activity / technique:
Electronic component manufacture
Process category (PROC):
PROC 3: Manufacture or formulation in the chemical industry in closed batch processes with occasional controlled exposure or processes with equivalent containment conditions
PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Substance supplied to that use in form of:
as such
in a mixture
Subsequent service life relevant for this use:
no

Uses at industrial sites

Contributing activity / technique for the environment
Name of activity / technique:
Manufacture of charged MAC/RAC systems
Environmental release category (ERC):
ERC7: Use of functional fluid at industrial site
Contributing activity / technique for workers
Name of activity / technique:
Manufacture of charged MAC/RAC systems
Process category (PROC):
PROC 9: Transfer of substance or mixture into small containers (dedicated filling line, including weighing)
Product category used:
PC 16: Heat transfer fluids
Sector of end use:
SU 17: General manufacturing, e.g. machinery, equipment, vehicles, other transport equipment
Substance supplied to that use in form of:
as such
in a mixture
Subsequent service life relevant for this use:
yes
Related assessment:
use not assessed

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported <10tonnes/year per registrant
Contributing activity / technique for the environment
Environmental release category (ERC):
ERC5: Use at industrial site leading to inclusion into/onto article
Contributing activity / technique for workersopen allclose all
Process category (PROC):
PROC 3: Manufacture or formulation in the chemical industry in closed batch processes with occasional controlled exposure or processes with equivalent containment conditions
Process category (PROC):
PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Subsequent service life relevant for this use:
no

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
Environmental release category (ERC):
ERC6a: Use of intermediate
Contributing activity / technique for workers
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Subsequent service life relevant for this use:
no

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported <10tonnes/year per registrant
Contributing activity / technique for the environment
Environmental release category (ERC):
ERC4: Use of non-reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workersopen allclose all
Process category (PROC):
PROC 3: Manufacture or formulation in the chemical industry in closed batch processes with occasional controlled exposure or processes with equivalent containment conditions
Process category (PROC):
PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
Product category used:
PC 21: Laboratory chemicals
Sector of end use:
SU 24: Scientific research and development
SU 0: Other: Other professional, scientific and technical activities n.e.c.
Subsequent service life relevant for this use:
no

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Reference
Name:
Perfluoroethane
Type of composition:
legal entity composition of the substance
State / form:
gas
Reference substance:
Perfluoroethane
Contributing activity / technique for the environment
Environmental release category (ERC):
ERC5: Use at industrial site leading to inclusion into/onto article
Contributing activity / technique for workers
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Substance supplied to that use in form of:
as such
Subsequent service life relevant for this use:
no

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
Environmental release category (ERC):
ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workers
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Subsequent service life relevant for this use:
no

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
Name of activity / technique:
Use of substance as processing aid and general chemical applications for chemical
reaction {Chemical industry, Electronics industry and similar)
Environmental release category (ERC):
ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workers
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
Product category used:
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Substance supplied to that use in form of:
as such
Subsequent service life relevant for this use:
no