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Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.

The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.

Diss Factsheets

Reference substances

Reference substances

Currently viewing:
IUPAC name:
trimethyl[(trimethylsilyl)oxy]silane

Inventory

EC number:
203-492-7
EC name:
Hexamethyldisiloxane
CAS number:
107-46-0
CAS number:
107-46-0
Synonyms
Names:
(TMS)2O
2,2,4,4-Tetramethyl-3-oxa-2,4-disilapentan HMDSO
Bis(trimethylsilyl) ether
Bis(trimethylsilyl) ether disiloxane, 1,1,1,3,3,3-hexamethyl- alpha-(Trimethylsilyl)-omega-methylpoly(oxy(dimethylsilylene))
Bis(trimethylsilyl) oxide
Disiloxane, hexamethyl-
HMDSO
Trimethyl[(trimethylsilyl)oxy]silane
Identifier:
IUPAC name
Hexamethyldisiloxane
Identifier:
IUPAC name
trimethyl(trimethylsilyloxy)silane
Identifier:
IUPAC name
trimethyl[(trimethylsilyl)oxy]silane
Identifier:
other: InChl
1/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
Identifier:
other: InChl
1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
Identifier:
other:
Bis(trimethylsilyl)ether
Identifier:
other:
Bis(trimethylsilyl)oxide
Identifier:
other:
Disiloxane, hexamethyl- (8CI, 9CI)
Identifier:
other:
HMDS
Identifier:
other:
HMDSO
Identifier:
other: InChl
InChI=1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
Identifier:
other: SMILES notation
O([Si](C)(C)C)[Si](C)(C)C
Identifier:
other:
Oxybis(trimethylsilane)
Identifier:
other: SMILES notation
[Si](O[Si](C)(C)C)(C)(C)C
hexamethyldisiloxane

Molecular and structural information

Molecular formula:
C6H18OSi2
Molecular weight:
162.377
SMILES notation:
C[Si](C)(C)O[Si](C)(C)C
InChl:
InChI=1/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
Structural formula:
Chemical structure

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