Registration Dossier

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Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.

The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.

Diss Factsheets

Environmental fate & pathways

Endpoint summary

Administrative data

Description of key information

Additional information

Trichlorosilane is an inorganic liquid substance which hydrolizes immediately and completely upon contact with water. Because of it high vapour pressure (590 mm Hg), trichlorosilane is expected to volatise (in the absence of water) from dry surfaces (e.g. dry soil). 


Based on its high vapour pressure (590 mm Hg at 25 deg C), trichlorosilane is expected to exist as a vapor in the atmosphere and is likely to degrade in the atmosphere by reaction with photochemically-produced hydroxyl radicals. However, upon reaction with water droplets in air, trichlorosilane will decompose instantly, releasinghydrochloric acid.


Overall, due to the rapid hydrolysis of trichlorosilane, other processes, including volatilization, as well as abiotic and biotic degradation are not expected to be important environmental fate processes for this chemical.