Registration Dossier

Diss Factsheets

Identification

Chemical structure
Display Name:
1,1,1,3,3,3-hexamethyldisilazane
EC Number:
213-668-5
EC Name:
1,1,1,3,3,3-hexamethyldisilazane
CAS Number:
999-97-3
Molecular formula:
C6H19NSi2
IUPAC Name:
bis(trimethylsilyl)amine

Type of Substance

Composition:
mono-constituent substance
Origin:
organic

Substance Identifiers open all close all

  • 1,1,1,3,3,3-Hexamethyldisilazan
  • A-166
  • Dow Corning(R) 4-2839 INT (PL fluid)
  • Dow Corning(R) Z-6079 silazane
  • Dynasylan(R) HMDS
  • Hexamethyldisilazane
  • SC3100Z
  • SH4002ZNC911
  • SH8270U
  • SH9151U
  • SH9161U
  • SL2501A
  • SL3358A
  • SL3358B
  • SL7230A
  • SL7230B
  • SL7240A
  • SL7240B
  • SL7250ATT903
  • SL7250ATT905
  • SL7250BTT903
  • SL7250BTT905
  • SL7260A
  • SL7260ATT903
  • SL7260ATT907
  • SL7260B
  • SL7260BTT903
  • SL7260BTT907
  • SL7270A
  • SL7270ATT903
  • SL7270B
  • SL7270BTT903
  • SL8601ACG791
  • SL8601ACG792
  • SL8601BCG791
  • SL8601BCG792
  • SL8609A
  • SL8609ACG792
  • SL8609B
  • SL8609BCG792
  • SL8640A
  • SL8640B
  • SL9051A
  • SL9051B
  • SL9055A
  • SL9055B
  • SL9340A
  • SL9340B
  • SL9805ARM102
  • SM8110Z
  • SM8120Z
  • Compositions

    Boundary Composition(s) open all close all

    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid
    Degree of purity:
    > 97 - <= 100 % (w/w)


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    Impurity 1
    Chemical structure
    Reference substance name:
    [amino(dimethyl)silyl]methane
    CAS Number:
    7379-79-5
    Molecular formula:
    C3H11NSi
    IUPAC Name:
    [amino(dimethyl)silyl]methane


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine

    Legal Entity Composition(s) open all close all

    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    other: Imported as a mixture of no-metal treated surfaces.


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    other: Imported as a mixture of no-metal treated surfaces.


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine

    Composition(s) generated upon use

    Other types of composition(s)