Registration Dossier

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Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.

The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.

Diss Factsheets

Physical & Chemical properties

Endpoint summary

Administrative data

Description of key information

Additional information

Overview of physico-chemical properties of trichlorosilane





Physical state at 20°C and 101.3 kPa

Colorless liquid


Melting / freezing point



Boiling point:


at 760 mm Hg

Relative density:


at 20 deg C

Vapour pressure:

590 mm Hg

78.6 kPa

at 25 °C; estimated value

Surface tension:



Water solubility:


Reacts violently with water, R14

Partition coefficient n-octanol/water (log value):


Inorganic substance

Flash point:

-14°C (Open cup)

-27°C (Closed cup)



Extremely Flammable


Explosive properties:

Not Explosive

Contains no groups associated with explosive properties

Self-ignition temperature:

182 deg C


Oxidising properties:

Not oxidizing



Not applicable

Liquid substance


0.397 centipoise at 0oC;

0.332 centipoise at 20oC; 0.316 centipoise at 25oC